4-Nano-Probe System for SEM

Specifications

 

XY Range

 

Coarse
±3 mm in ±150 nm steps

Fine
≤1 μm in 10 nm* steps


Z Range


Coarse
±1.5mm in 150 nm steps


Fine
≤1 μm in 10 nm*  steps
 

Sample Size
10mm × 10mm × 1mm


Weight
≤1000g
 
Features

This system is installed in SEM stage and measures 4 point local electric conduction in submicron area.
Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC.