SURFTENS WH 300
The leading equipment for professional use in 200 and 300 mm wafer processing in semicunductor technology.
SURFTENS WH 300 is equipped with a 3 axis wafer roboter, wafer scanner, loadport for 200 and/or 300 mm wafers, fan filter unit, notching system. Suitable for any cleanroom class it features the automatic mapping of contact angles on wafers for up to 25 wafers.

GENERAL HARDWARE

Wafer handling capability for 12« wafer / and or 8« wafers
System guarantees slot integrity
Manual focus system, OEG provides detailed instruction for focus adjustment
OEG provides concept for maintenance, spare parts, complete users guide
OEG provides instruction for change of syringe

Wafer chuck only defined by measurement characteristics

Air pressure, vacuum, exhaust is provided by customer

Customer provides 300mm wafers plus FOUPs for development system setup

After measurement liquid will be evaporated by hotplate (optional)

Work place contains keyboard and mouse

 
 

TOOL CONFIGURATION

Configuration – unit description:

1) Wafer handling system

3-axis wafer handling robot

FOUP opening system 300 mm

Loadport (OCL) 200 mm

Laser scanner

Vacuum endeffector

Notching system