Theta Probe 表面分析系統─Non-tilt ARXPS
Thermo Scientific™ Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System 為直接多角度X光光電子能譜儀,讓Ultra-Thin Layers樣品直接分析,在樣品不做傾斜角度且不破壞特性的情形下,取得正確與一致性的ARXPS表面分析結果。

Theta Probe配備micro-focused X-ray source和parallel ARXPS analyzer,讓複雜的薄膜分析更簡單也更快速,此外,可以加裝UV Source和MAGCIS™ dual mode離子槍提升其他分析的應用能力。

特 點:

●  分析應用多(包括Parallel ARXPS for ultra-thin film measurements without tilting, Small spot X-ray source for small feature analysis, Chemical state imaging, Large sample analysis, Ion source for depth profiling, Layer Sequencing, Thickness measurements, Depth Profiles, etc)
●  UHV mu-metal chamber
●  提供High Performance XPS Spectroscopy, Insulator Analysis, Chemical State Imaging, Depth Profiling, Precise results quickly and efficiently